Mark J. Dalberth Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Dalberth returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor |