Shane O'Brien Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shane O'Brien returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
2Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
3Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
4Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition