I-Feng Lin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by I-Feng Lin returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition


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