Christian Dussarrat Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Christian Dussarrat returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD of Copper using New Precursors for Next Generation of Interconnections
2Copper-ALD Seed Layer as an Enabler for Device Scaling
3Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
4Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
5Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
6Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition