Marius Grundmann Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Marius Grundmann returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Annealing Effects on the Band Alignment of ALD SiO2 on (InxGa1-x)2O3 for x = 0.25-0.74 |