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Boaz Pokroy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Boaz Pokroy returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
2A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
3A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs