Sylvain Le Gall Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sylvain Le Gall returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
2Capacitance characterization of GaP/n-Si structures grown by PE-ALD