
Sylvain Le Gall Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sylvain Le Gall returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Capacitance characterization of GaP/n-Si structures grown by PE-ALD |
2 | Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD |