Min Li Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Min Li returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition|
|2||Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition|