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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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V. Ya. Martens Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by V. Ya. Martens returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
2Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
3Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
4Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition