September 2022 Stats

The publication database currently has 1652 entries.

204 Films

274 Precursors

77 Dep Hardware Sets

253 Characteristics

91 Theses

5082 Authors

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2021 Year in Review

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Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology Texture of atomic layer deposited ruthenium Comparative study of structural electrical dielectric and ferroelectric properties of HfO₂ deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET

Zachary R. Robinson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zachary R. Robinson returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
2	In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
3	Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
4	Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
5	Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering