Liqi Wu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Liqi Wu returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
2Hydrogen plasma-enhanced atomic layer deposition of copper thin films
3Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
4Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers