Sorin Cristoloveanu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sorin Cristoloveanu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Capacitance-voltage characterization of Al2O3/GaN-on-insulator (GaNOI) structures with TMAH surface treatment
2Field-effect passivation of Si by ALD-Al2O3: Second harmonic generation monitoring and simulation