Christoph Hoßbach Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Christoph Hoßbach returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Breakdown and Protection of ALD Moisture Barrier Thin Films
|Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films