Lin-Gui Xie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lin-Gui Xie returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD