Matti Putkonen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matti Putkonen returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Properties of AlN grown by plasma enhanced atomic layer deposition
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
4Comparative study of ALD SiO2 thin films for optical applications