Stefano Dallorto Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefano Dallorto returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses
2Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features