Lionel Santinacci Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Lionel Santinacci returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition|
|2||Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications|