Your search for plasma enhanced atomic layer deposition publications authored by Rolf Brendel returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Improved understanding of recombination at the Si/Al2O3 interface|
|2||Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells|
|3||Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?|
|4||Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks|
|5||Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3|
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