Jong Hyun Seo Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jong Hyun Seo returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant|
|2||Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization|