Eric Lambers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric Lambers returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
2Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3
3GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
4TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films


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