Eric Lambers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric Lambers returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
2Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3
3TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
4Band Offsets for Atomic Layer Deposited HfSiO4 on (Al0.14Ga0.86)2O3