Claudia Richter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Claudia Richter returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Breakdown and Protection of ALD Moisture Barrier Thin Films
2Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma