Hele Savin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hele Savin returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Silicon surface passivation with atomic layer deposited aluminum nitride
2Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
3Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide