November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Matthias Albert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthias Albert returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Breakdown and Protection of ALD Moisture Barrier Thin Films
2	Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
3	Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
4	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
5	In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
6	In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
7	Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films