Scott G. Walton Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott G. Walton returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
2Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
3Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
4The role of plasma in plasma-enhanced atomic layer deposition of crystalline films