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Scott G. Walton Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott G. Walton returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
2Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
3Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
4Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
5Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
6Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
7Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources