December 2022 Stats

The publication database currently has 1658 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5093 Authors

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2021 Year in Review

Recent Database Additions

Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy Uniformity of HfO₂ Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y₂O₃ dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices

Scott G. Walton Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Scott G. Walton returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
2	Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO₂ Films Grown by the Plasma-Assisted Atomic Layer Deposition
3	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
4	Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T_e plasma sources
5	Phase Control of Crystalline Ga₂O₃ Films by Plasma-Enhanced Atomic Layer Deposition
6	Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
7	The role of plasma in plasma-enhanced atomic layer deposition of crystalline films