Hilde Poelman Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hilde Poelman returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
2Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
3Plasma enhanced atomic layer deposition of Ga2O3 thin films
4Tuning size and coverage of Pd nanoparticles using atomic layer deposition