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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
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Dong Wang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dong Wang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing
23D structure evolution using metastable atomic layer deposition based on planar silver templates