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The publication database currently has 1536 entries.
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189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

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Recent Database Additions
Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
Search 1536 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics

Jaeyeong Heo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaeyeong Heo returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
2Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
3The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
4Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery

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