Donghyuk Shin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Donghyuk Shin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
2Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method