Serge Ecoffey Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Serge Ecoffey returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering |