A. L. Vasiliev Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. L. Vasiliev returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition


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