J. H. Klootwijk Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. H. Klootwijk returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
3Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films