Maki Shimizu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maki Shimizu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors