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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Uwe Hübner Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Uwe Hübner returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
2Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
3Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
4Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
53D structure evolution using metastable atomic layer deposition based on planar silver templates