Uwe Hübner Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Uwe Hübner returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
2Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
3Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes
4Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
53D structure evolution using metastable atomic layer deposition based on planar silver templates