Uwe Hübner Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Uwe Hübner returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
23D structure evolution using metastable atomic layer deposition based on planar silver templates
3Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
4Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
5Background-Free Bottom-Up Plasmonic Arrays with Increased Sensitivity, Specificity and Shelf Life for SERS Detection Schemes