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Charles R. Eddy, Jr. Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Charles R. Eddy, Jr. returned 20 record(s).

NumberTitle
1Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
2Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
3Atomic layer epitaxy for quantum well nitride-based devices
4Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
5Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
6Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
7Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
8The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
9Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
10ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
11Perspectives on future directions in III-N semiconductor research
12Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
13Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
14Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
15Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
16Microstructure and Interfaces of Ultra-Thin Epitaxial AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition at Relatively Low Temperatures
17Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
18Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
19Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
20Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods