Charles R. Eddy, Jr. Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Charles R. Eddy, Jr. returned 16 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
2Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
3Atomic layer epitaxy for quantum well nitride-based devices
4Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
5Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
6Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
7Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
8Growth of AlN/Pt heterostructures on amorphous substrates at low temperatures via atomic layer epitaxy
9Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
10Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
11Perspectives on future directions in III-N semiconductor research
12Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
13Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
14Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
15The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
16Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering