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The publication database currently has 1559 entries.
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192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

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Recent Database Additions
Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
Search 1559 plasma ALD publications by:
192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

Sanjie Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sanjie Liu returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
2Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
3PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
4Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application

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