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The publication database currently has 1536 entries.
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189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
Search 1536 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics

Hoon Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hoon Kim returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu
2Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter
3Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition
4Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma

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Top Authors
Erwin (W.M.M.) Kessels
Hyeongtag Jeon
Hyungjun Kim
Mauritius C. M. (Richard) van de Sanden
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