Jong-Sik Choi Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jong-Sik Choi returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
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1 | Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma |