Mickaël Gros-Jean Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mickaël Gros-Jean returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
2Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
3PEALD ZrO2 Films Deposition on TiN and Si Substrates
4Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
5Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors