Jiajun Mao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jiajun Mao returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1PEALD of Copper using New Precursors for Next Generation of Interconnections
2Copper-ALD Seed Layer as an Enabler for Device Scaling
3Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD