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The publication database currently has 1567 entries.

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265 Precursors and Plasma Gases

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

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195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Shi-Woo Rhee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shi-Woo Rhee returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Chemical Reaction Mechanism in the Atomic Layer Deposition of TaC_xN_y Films Using tert-Butylimidotris(diethylamido)tantalum
2	Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and tert-Butylimidotris( diethylamido)-tantalum (TBTDET), and its Effect on Material Properties
3	Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
4	Plasma enhanced atomic layer deposition of SrTiO₃ thin films with Sr(tmhd)₂ and Ti(i-OPr)₄
5	Plasma Enhanced Atomic Layer Deposition of TiC_xN_y Film with Various Reactive Gases
6	Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas