Xiaoye Qin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiaoye Qin returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors