Aniruddh Shekhawat Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Aniruddh Shekhawat returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films