Verena Steckenreiter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Verena Steckenreiter returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Kinetics of the permanent deactivation of the boron-oxygen complex in crystalline silicon as a function of illumination intensity
2Two-stage permanent deactivation of the boron-oxygen-related recombination center in crystalline silicon