Yong Tae Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yong Tae Kim returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect
2A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
3Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
4Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
5Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization