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Jerry W. Johnson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jerry W. Johnson returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors
2GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation