Your search for plasma enhanced atomic layer deposition publications authored by DaShen Shen returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures|
|2||Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si|
|3||Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition|
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