DaShen Shen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by DaShen Shen returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
2Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si
3Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures