Seungjun Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seungjun Lee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
2The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
3Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition