Seungjun Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seungjun Lee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
2Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition
3Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer