S. A. F. Dielissen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by S. A. F. Dielissen returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy |