Steven A. Vitale Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steven A. Vitale returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
2Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates