Steven A. Vitale Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Steven A. Vitale returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates|
|2||Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide|