Heungseop Song Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Heungseop Song returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method|
|2||Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition|